DC111 Spray CoaterThis device is a spray coater which is developed for MEMS devices and various types of semiconductor research.
1. Corresponding to the MEMS devices
2. Film thickness uniformity of the coating even to the uneven surface
3. Vias, trenches embedded application
4. Equipped with a built-in heater sample stage. Sample temperature control up to 100 ℃ is possible.
5. As for servo motor, our "Si-servo" is used which is low vibration, low heat generation and high accuracy.
6. Special specifications are also available.